Ok, since I have majority conveyor wash experience I'll start there,
A great place to find info and prices would be sonnys direct, that's the company with the best support and most comprehensive info. The wash equipment and supporting equipment room for a 130' tunnel comes to the 320k area. But that's everything from the presoak to the dryers and an auto tire shine unit. It was 30k for the factory installation team that comes from the mfg, each automated entry machine can run to 30k, water reclaim systems are very high and also require extensive construction in the beginning, 6-8 tanks underground holding around 30k gallons of water being ozonated with the equipment room unit. ( does help sales in drought areas and can be advertising as a "green facility") example store: 135' tunnel, 3 auto sentry units, 6 25hp vac stations with 6-8 drops each, just over an acre of land on a prime spot, chemicals, utilities, and employees on a 400 car day might come out with the area of 4k in gross, but minus cost try more towards 1.5-2k I have seen and have worked at the washes on days that passed 1200 cars and averaged $7.xx per car with 4 employees on clock. Keep in mind the highest peaking stores were located in low or middle class areas. The one we had in an affluent area hit 900 at the most.
So with land, construction, equipment, consumables, and setup it can pass 2m in initial cost. Check out Sonny's wash equipment and for self serve info, check out my friend's blog at cwguy.com
Ask more if ya need to,
Joey