What towels are you using? I had the same problem where the edges of my towels were marring the paint as I buffed off the polish. Got some edgeless towels, no more marring.
What MF are you using?
I was having the same issues on soft jet black BMW paint using my typical 500 gsm MF with silk edges. Those edges can mar very soft paint.
Don't let your edges touch the paint or use edgeless towels.