I have a 5" backing plate on my DA can I use a 6"foam pad?

Not sure what machine you have, but technically you could.

But if you have a free-spinning DA, you are asking for a lot of stalling.
 
No because the 6in pad would have a 6.5 face
.
You'd have a 1in overhang on the Velcro side and an 1.5in overhang on the face side

That combo would lead to

Inconsistent cut/finish
Accelerated Pad wear

Get a 5in (5.5 face) pad
 
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